Micro Fab Equipment
- Clean Room
The class 100 enclosure manufactured by Innotech Products Inc., provides a dust-free (less than 100 particles per cubic foot) and UV-filtered environment suitable for micro-fabrication processes. The deposition, photolithography, and chemical processing stations are housed within the clean room enclosure.
- Deposition Station,
Uses sputtering technique to grow microsn scale thin films of metalic and non metalic materials including gold, chrome, silver, copper, silicon nitride, and silicon dioxide, manufactured by Angstrom Engineering Inc.
- Photolithography Station,
Projects micron-scale features and patterns onto integrated prototypes exposing photosensitive thin films for developing and subsequent deposition or etching. Manufactured by Optical Associates Inc.
- Chemical Processing Station,
Provides a safe environment for chemical etching of micro-structures after the sputtering and photo-lithography processes. All generalized chemical processing can be carried out within this system made by NuAire Poly.
- Electronics Prototyping Station, and
Provides a wire bondingfacility for connecting wires much smaller than your hair to the integrated circuit carrier for further integration with larger scale circuits. Supporting assembly and diagnostic tools provide an efficient environment for prototyping new micro-scale devices.
- Laser Micro-milling Station (School of Engineering Machine Shop).
This universal tool provides micron-scale machining capacity for glass, silicon, polymers, and metals using laser milling. This Oxford Laser A-series tool can machine features down to 1/2 micron in x,y,and z directions.
For more information visit the Micro Fab aka Applied Micro & Nanosystems Facility website.